TIT# From atoms to layers: in situ gold growth kinetics during sputter deposition
AUT# Schwartzkopf, Matthias; Buffet, Adeline; K”rstgens, Volker; Metwalli, Ezzeldin;
     Schlage, Kai; Benecke, Gunthard; Perlich, Jan; Rawolle, Monika;
     Rothkirch, Andr‚; Heidmann, Berit; Herzog, Gerd; M�ller-Buschbaum, Peter;
     R”hlsberger, Ralf; Gehrke, Rainer, Stribeck, Norbert; Roth, Stephan V;
SOU# RSC Nanoscale (2013), 5(11), 5053-5062
LOC# xv142
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ABS# The adjustment of size-dependent catalytic, electrical and optical
     properties of gold cluster assemblies is a very significant issue in
     modern applied nanotechnology. We present a real-time investigation of
     the growth kinetics of gold nanostructures from small nuclei to a
     complete gold layer during magnetron sputter deposition with high time
     resolution by means of in situ microbeam grazing incidence small-angle
     X-ray scattering (GISAXS). We specify the four-stage growth including
     their thresholds with sub-monolayer resolution and identify phase
     transitions monitored in Yoneda intensity as a material-specific
     characteristic. An innovative and flexible geometrical model enables the
     extraction of morphological real space parameters, such as cluster size
     and shape, correlation distance, layer porosity and surface coverage,
     directly from reciprocal space scattering data. This approach enables a
     large variety of future investigations of the influence of different
     process parameters on the thin metal film morphology. Furthermore, our
     study allows for deducing the wetting behavior of gold cluster films on
     solid substrates and provides a better understanding of the growth
     kinetics in general, which is essential for optimization of manufacturing
     parameters, saving energy and resources.